The Zeiss Crossbeam 540 is a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) workhorse that is available for both analytical imaging of whole samples and 3D nanotomography of embedded samples. Equipped with a GEMINI II column, this SEM has superb low kV performance, and the ability to fine-tune lens parameters for optimizing imaging quality and acquisition speed. The voltage can be adjusted from 0.02-30 kV (10pA to 40nA probe current) with 3.0nm resolution at 0.2kV, 1.8nm resolution at 1kV, and 0.9nm resolution at 15kV. In order to accommodate a large array of sample types, the system is equipped with the following detectors:
- Everhart-Thornley Secondary Detector
- In-lens Secondary Detector
- 4-quadrant Solid State Backscatter Detector
- In-lens Energy Selective Backscatter Detector
- Solid State STEM Detector
The Crossbeam 540 is equipped with a Capella Ga-Liquid Metal Ion Source (Ga-LMIS) column that is capable of 3nm milling resolution at 30kV. The column can be set to 0.5-30kV (1pA to 100nA probe current). When coupled with the unique nature of the GEMINI II column, imaging can be performed using only the SEM column, only the FIB column, or simultaneous SEM imaging/FIB imaging or milling for easy monitoring of routines. For masking and charge compensation purposes, the instrument is equipped with two Orsay gas injection systems with both Pt and C precursor gasses.
In addition to the included imaging software, the Crossbeam 540 is also equipped with the ATLAS 5.0 scan engine which boasts gigapixel imaging capabilities (50k x 40k pixels) for large-area imaging projects. In addition, the software comes with two unique imaging modules:
- Array Tomography – This module allows the automated imaging of biological serial sections for 3D analysis of large volumes.
- 3D Tomography – This module offers an automated solution with unique, high-speed proprietary workflows for the automatic acquisition of FIB tomography datasets.